Volume 14 Number 5 October 2000

A PUBLICATION OF THE IEEE LASERS AND ELECTRO-OPTICS SOCIETY

In this Issue . . .

President's Column

Editor's Comments

LEOS 2000 – A Preview of the 13th Annual Meeting

Overview of the IEEE/LEOS Summer Topical on Sensing in Semiconductor Manufacturing

• Real-Time Control of Substrate Temperature Using Band Edge Thermometry
• Spectroscopic Ellipsometry and Reflectometry: A User’s Perspective
• On-Line Impurity Detection in Corrosive Gases Using Quadrupole Mass Spectrometry
• Nonlinear Optics and Spectroscopic Ellipsometry as Probes for In-Situ Monitoring and Control
• An IR Tunable Diode Laser Absorbtion Spectrometer for Trace Humidity Measurments at Atmospheric Pressure
• AlGaAs Composition Measurements from In Situ Optical Reflectance
• Plasma Diagnostics for Semiconductor Processing
• Real-Time Optical Monitoring and Comtrol of Epitaxial Growth
• Trace Moisture Detection using Near Infrared Diode Lasers
• Application of Diode Laser Spectroscopy for Moisture Contamination Measurement in Semiconductor Processing
• In Situ Reflectance Monitoring of Epitaxial Growth
• Scatterometry Applied to Microelectronics Processing

Dr. Teiji Uchida Receives the Distinguished Service Award

LEOS Graduate Student Fellowship Winners Announced

Awards and Recognitions at LEOS 2000

New Senior Members

LEOS Masthead

Mission Statement/Advertising Rates

Go to LEOS Home Page

LEOS Newsletter is published bimonthly by the Lasers and Electro-Optics Society of the Institute of Electrical and Electronics Engineers, Inc., Corporate Office: 3 Park Ave., 17th Floor,  New York, NY 10016-5997. Printed in the USA. One dollar per member per year is included in the Society fee for each member of the Lasers and Electro-Optics Society. Periodicals postage paid at New York, NY and at additional mailing offices. Postmaster: Send address changes to LEOS Newsletter, IEEE, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08855-1331.

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